成長装置 (Equipment for growth process)

Molecular Beam Epitaxy

Molecular Beam Epitaxy

Molecular Beam Epitaxy

Molecular Beam Epitaxy

Metal Organic Chemical Vapor Deposition

測定・評価装置 (Equipment for measurement)

High-resolution Scanning Electron Microscope (SEM+STEM+EDX)

High-resolution X-ray Diffractmeter (XRD)

Atomic Force Microscope (AFM)

Laser System ( Ti:sapphire laser system ) Equipment for Spectroscopy

プロセス装置 (Equipment for device process)

Manipulation System Microscope using SEM

Transfer printing apparatus

Thickness Mater using Optical interference

Electron Beam Lithography Systems (EB)

Mask-less Laser Lithography System

ICP Reactive Ion Etching Systems

Sputtering systems and Electron Beam vapor deposition systems