研究設備トップ成長装置測定・評価装置プロセス装置

成長装置 (Equipment for growth process)

InGaAs(Pも可)系MOCVD成長装置
MOCVD system for GaAs

Group III: TMG TMA TMI TEG TEA
Group V: TBA AsH3 TBP
Dopant: SiH4 DEZ
GaN系MOCVD成長装置
MOCVD system for GaN

Group III: TMG TMA TMI
Group V: NH3
Dopant: SiH4 Cp2Mg
GaInNAs系MOCVD成長装置
MOCVD system for GaInNAs

Group III: TMG TMA TMI TEG
Group V: NH3 TBA TBP DMHy
Dopant: CBr4 DMZn
Group III: TMG TMA TMI
MBE成長装置(GaAs系、Sb系、N系)
MBE system

Group III: Al Ga In
Group V: N As Sb
dopant: Si Be
MBE成長装置(N系)
MBE system

Group III: Al Ga In
Group V: N
dopant: Si Mg
STMその場観察の可能なMBE装置
Scanning Tunneling Microscope system located inside MBE growth chamber

有機EL素子作製装置
Organic light emitting device fabrication system

(From left side ...)
Sputtering Chamber
Pretreatment Chamber
Organic Chamber
Electrode Chamber