FacilitiesGrowthMeasurementDevice process

Equipment for growth process

  • MOCVD system for GaAs
  • MOCVD system for GaN
  • MOCVD system for GaInNAs
  • MBE system I
  • MBE system II
  • STM located inside MBE
  • Organic device fabrication system

    Equipment for measurement

  • High-resolusion SEM (1)
  • High-resolusion SEM (2)
  • Multi-mode AFM
  • Contact-mode AFM
  • High-vaccum STM
  • Laser system (1) (Mira, Regen)
  • Laser system (2) (Mira-Seed)
  • Triple-grating monochromator
  • FTIR
  • Evaluation system for electrical measurement
  • High-resolution XRD
  • UV-vis-NIR-spectrophotometer
  • Photoelectron spectroscopy in air
  • Blue-laser microscope

    Equipment for device process

  • Electron beam lithography
  • ICP reactive ion etching
  • Semiconductor laser chip bonder
  • Wire bonder
  • Sputtering systems
  • Electron beam evaporator